書誌事項

Nondestructive evaluation of semiconductor materials and devices

edited by Jay N. Zemel

(NATO advanced study institutes series, Series B . Physics ; v. 46)

Plenum Press, c1979

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注記

Lectures presented at the NATO Advanced Study Institute on Nondestructive Evaluationof Semiconductor Materials and Devices, held at the Villa Tuscolano, Italy,September 19-29, 1978

Includes bibliographical references and index

"Published in cooperation with NATO Scientific Affairs Division."

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