Lasers in microlithography : 2-3 March 1987, Santa Clara, California

著者

書誌事項

Lasers in microlithography : 2-3 March 1987, Santa Clara, California

Daniel J. Ehrlich, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 774）

The Society, c1987

  • pbk.

大学図書館所蔵 件 / 全8件

この図書・雑誌をさがす

注記

Errata slip inserted

Label on cover: Daniel J. Ehrlich, Jeffrey Y. Tsao, John Samuel Batchelder, chairs/editors

Includes bibliographical references and index

関連文献： 1件中  1-1を表示

  • Proceedings

    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

詳細情報

ページトップへ