Materials reliability issues in microelectronics : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.
著者
書誌事項
Materials reliability issues in microelectronics : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.
（Materials Research Society symposium proceedings, v. 225）
Materials Research Society, c1991
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注記
Proceedings of the First MRS Symposium on Materials Reliability Issues in Microelectronics
Includes bibliogrpahical references and index
内容説明・目次
内容説明
With the increased complexity of modern integrated circuits, it is important that reliability problems be attacked properly with the appropriate tools. This volume recognizes that almost all reliability problems are materials problems, and helps to put 'reliabilty physics' on a firm scientific foundation. Topics include: electromigration; stress effects on reliability; stress and packaging; metallization; device, oxide and dielectric reliability; new investigative techniques; corrosion.
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