Analysis of microelectronic materials and devices

著者

書誌事項

Analysis of microelectronic materials and devices

edited by M. Grasserbauer and H.W. Werner

Wiley, c1991

大学図書館所蔵 件 / 全13件

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注記

Includes bibliographical references and index

内容説明・目次

巻冊次

ISBN 9780471917137

内容説明

Presents a comprehensive survey of analytical techniques currently used in support of all stages of microelectronic materials and device processing. The diversity of topics covered has been achieved by bringing together an international field of authors contributing specialized chapters.
巻冊次

ISBN 9780471950134

内容説明

This book presents, for the first time, a comprehensive survey ofanalytical techniques currently used in support of all stages ofmicroelectronic materials and device processing. The diversity oftopics covered in this book has been achieved by bringing togetheran international field of authors contributing specializedindividual chapters. This has ensured that each technique isdiscussed in detail giving in-depth treatments of the subjectmatter. A particularly helpful feature in this book is the concisetechnical summary given at the end of each section. Four majorareas are considered in this volume: * Bulk analysis of microelectronic materials * Analysis of surfaces, interfaces and thin films * Structure analysis on an atomic scale * Characterization of physical, electrical and topographicfeatures Complete with over 400 illustrations, this volume is anindispensible guide to analytical support for the microelectronicindustry.

目次

Bulk Analysis of Microelectronic Materials. Analysis of Surfaces, Interfaces and Thin Films. Structure Analysis on an Atomic Scale. Physical, Electrical and Geometrical Characterization. Index.

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