Ion implantation in semiconductors : silicon and germanium

Author(s)

• Mayer, James W.
• Eriksson, Lennart
• Davies, John Arthur

Bibliographic Information

Ion implantation in semiconductors : silicon and germanium

[by] James W. Mayer, Lennart Eriksson and John A. Davies

Academic Press, 1970

Note

Includes bibliographical references

Details

• NCID: BA18163723
• ISBN:
  • 0124808506
• LCCN: 75107563
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: New York
• Pages/Volumes: xiii, 280 p.
• Size: 24 cm
• Classification:
  • LCC : TK7871.85
  • DC : 621.381/52
• Subject Headings:
  • LCSH : Ion implantation
  • LCSH : Semiconductors