Handbook of VLSI microlithography : principles, technology, and applications

著者

• Glendinning, William B.
• Helbert, John N.

書誌事項

Handbook of VLSI microlithography : principles, technology, and applications

edited by William B. Glendinning, John N. Helbert

（Materials science and process technology series）

Noyes Publications, c1991

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA19304842
• ISBN:
  • 0815512813
• LCCN: 90023646
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Park Ridge, N.J., U.S.A.
• ページ数/冊数: xxii, 649 p.
• 大きさ: 25 cm
• 分類:
  • LCC : TK7874
  • DC20 : 621.381/531
• 件名:
  • LCSH : Integrated circuits -- Very large scale integration
  • LCSH : Microlithography
• 親書誌ID:
  • BA04523161