Handbook of VLSI microlithography : principles, technology, and applications

Author(s)

• Glendinning, William B.
• Helbert, John N.

Bibliographic Information

Handbook of VLSI microlithography : principles, technology, and applications

edited by William B. Glendinning, John N. Helbert

（Materials science and process technology series）

Noyes Publications, c1991

Note

Includes bibliographical references and index

Details

• NCID: BA19304842
• ISBN:
  • 0815512813
• LCCN: 90023646
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Park Ridge, N.J., U.S.A.
• Pages/Volumes: xxii, 649 p.
• Size: 25 cm
• Classification:
  • LCC : TK7874
  • DC20 : 621.381/531
• Subject Headings:
  • LCSH : Integrated circuits -- Very large scale integration
  • LCSH : Microlithography
• Parent Bibliography ID:
  • BA04523161