Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing I

著者

• Schmidt, Dennis N.
• Electrochemical Society. Electronics Division
• Electrochemical Society. Dielectric Science and Technology Division

書誌事項

Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing I

edited by Dennis N. Schmidt, assistant editors, David Reedy, Alex Schwarz ; Electronics and Dielectric Science and Technology Divisions

（Proceedings / [Electrochemical Society], v. 92-21）

Electrochemical Society, c1992

注記

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA19556991
• ISBN:
  • 156677022X
• LCCN: 92073946
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, N.J.
• ページ数/冊数: x, 501 p.
• 大きさ: 23 cm
• 親書誌ID:
  • BA01323290