Proceedings of the Ninth Symposium on Plasma Processing

著者

• Symposium on Plasma Processing
• Mathad, G. S.
• Hess, Dennis W.
• Electrochemical Society. Dielectric Science and Technology Division
• Electrochemical Society. Electronics Division

書誌事項

Proceedings of the Ninth Symposium on Plasma Processing

edited by G.S. Mathad, D.W. Hess

（Proceedings / [Electrochemical Society], 92-18）

Electrochemical Society, c1992

タイトル別名

Plasma processing

注記

"Dielectric Science and Technology and Electronics Divisions."

Spine title: Plasma processing

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA19725126
• ISBN:
  • 1566770203
• LCCN: 92082777
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: xiii, 654 p.
• 大きさ: 23 cm
• 分類:
  • LCC : TK7871.85
  • DC20 : 621.3815/2
• 件名:
  • LCSH : Semiconductors -- Etching -- Congressses
  • LCSH : Plasma etching -- Congresses
• 親書誌ID:
  • BA01323290