Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing

Author(s)

• Kolbesen, Bernd O.
• Electrochemical Society. Electronics Division

Bibliographic Information

Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing

edited by B.O. Kolbesen ... [et al.] ; [sponsored by the] Electronics Division

（Proceedings / [Electrochemical Society], v. 93-15）

Electrochemical Society, c1993

Note

Symposium held in Grenoble, France, on September 17th, 1993

Includes bibliographical references and indexes

Details

• NCID: BA21147496
• ISBN:
  • 1566770599
• LCCN: 93072861
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, NJ
• Pages/Volumes: ix, 283 p.
• Size: 23 cm
• Parent Bibliography ID:
  • BA01323290