Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing

著者

• Kolbesen, Bernd O.
• Electrochemical Society. Electronics Division

書誌事項

Proceedings of the Satellite Symposium to ESSDERC 93 Grenoble/France : crystalline defects and contamination: their impact and control in device manufacturing

edited by B.O. Kolbesen ... [et al.] ; [sponsored by the] Electronics Division

（Proceedings / [Electrochemical Society], v. 93-15）

Electrochemical Society, c1993

注記

Symposium held in Grenoble, France, on September 17th, 1993

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA21147496
• ISBN:
  • 1566770599
• LCCN: 93072861
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: ix, 283 p.
• 大きさ: 23 cm
• 親書誌ID:
  • BA01323290