Handbook of semiconductor wafer cleaning technology : science, technology, and applications

Author(s)

• Kern, Werner

Bibliographic Information

Handbook of semiconductor wafer cleaning technology : science, technology, and applications

edited by Werner Kern

Noyes Publications, c1993

Note

Includes bibliographical references and index

Description and Table of Contents

Description

This book brings together into one volume all pertinent knowledge on semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. The book provides the first comprehensive and up-to-date co

Table of Contents

Overview and Evolution of Semiconductor Wafer Contamination and Cleaning TechnologyTrace Chemical Contamination on Silicon SurfacesAqueous Cleaning ProcessesParticle Deposition and AdhesionOverview of Dry Wafer Cleaning ProcessesU

by "Nielsen BookData"

• NCID: BA21455942
• ISBN:
  • 0815513313
• LCCN: 93004078
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Park Ridge, N.J.
• Pages/Volumes: xx, 623 p.
• Size: 25 cm
• Classification:
  • LCC : TK7871.85
  • DC20 : 621.3815/2
• Subject Headings:
  • LCSH : Semiconductor wafers -- Cleaning