Handbook of semiconductor wafer cleaning technology : science, technology, and applications
Author(s)
Bibliographic Information
Handbook of semiconductor wafer cleaning technology : science, technology, and applications
Noyes Publications, c1993
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Note
Includes bibliographical references and index
Description and Table of Contents
Description
This book brings together into one volume all pertinent knowledge on semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. The book provides the first comprehensive and up-to-date co
Table of Contents
Overview and Evolution of Semiconductor Wafer Contamination and Cleaning TechnologyTrace Chemical Contamination on Silicon SurfacesAqueous Cleaning ProcessesParticle Deposition and AdhesionOverview of Dry Wafer Cleaning ProcessesU
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