Handbook of semiconductor wafer cleaning technology : science, technology, and applications

- Kern, Werner

著者

- Kern, Werner

書誌事項

edited by Werner Kern

Noyes Publications, c1993

大学図書館所蔵件 / 全5件

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注記

Includes bibliographical references and index

内容説明・目次

内容説明

This book brings together into one volume all pertinent knowledge on semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. The book provides the first comprehensive and up-to-date co

Overview and Evolution of Semiconductor Wafer Contamination and Cleaning TechnologyTrace Chemical Contamination on Silicon SurfacesAqueous Cleaning ProcessesParticle Deposition and AdhesionOverview of Dry Wafer Cleaning ProcessesU

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