Nanolithography : a borderland between STM, EB, IB, and X-ray lithographies

Author(s)

• NATO Advanced Research Workshop on "Nanolithography: a Borderland Betweeen STM, EB, IB, and X-Ray Lithographies"
• Gentili, M.
• Giovannella, Carlo
• Selci, S.
• North Atlantic Treaty Organization. Scientific Affairs Division

Bibliographic Information

Nanolithography : a borderland between STM, EB, IB, and X-ray lithographies

edited by M. Gentili, C. Giovannella, and S. Selci

（NATO ASI series, ser. E . Applied sciences ; v. 264）

Kluwer Academic Publishers, 1994

Note

"Proceedings of the NATO Advanced Research Workshop on Nanolithography: a Borderland between STM, EB, IB, and X-Ray Lithographies, Frascati, Roma, Italy, April 6-8, 1993"--T.p. verso

"Published in cooperation with NATO Scientific Affairs Division."

Includes index

Details

• NCID: BA22470329
• ISBN:
  • 0792327942
• LCCN: 94010205
• Country Code: ne
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Dordrecht ; Boston
• Pages/Volumes: xii, 215 p.
• Size: 25 cm
• Classification:
  • LCC : TK7874.8
  • DC20 : 621.3815/31
• Subject Headings:
  • LCSH : Molecular electronics -- Congresses
  • LCSH : Microlithography -- Congresses
  • LCSH : Nanotechnology -- Congresses
  • LCSH : Integrated circuits -- Design and construction -- Congresses
• Parent Bibliography ID:
  • BA00020624