Nanolithography : a borderland between STM, EB, IB, and X-ray lithographies
著者
書誌事項
Nanolithography : a borderland between STM, EB, IB, and X-ray lithographies
（NATO ASI series, ser. E . Applied sciences ; v. 264）
Kluwer Academic Publishers, 1994
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注記
"Proceedings of the NATO Advanced Research Workshop on Nanolithography: a Borderland between STM, EB, IB, and X-Ray Lithographies, Frascati, Roma, Italy, April 6-8, 1993"--T.p. verso
"Published in cooperation with NATO Scientific Affairs Division."
Includes index