Proceedings, IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems : Oiso, Japan, January 25-28, 1994

著者

• IEEE Robotics and Automation Society
• American Society of Mechanical Engineers. Dynamic Systems and Control Division
• Micromachine Center
• IEEE Workshop on Micro Electro Mechanical Systems

書誌事項

Proceedings, IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems : Oiso, Japan, January 25-28, 1994

sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division and the Micromachine Center

IEEE Service Center, c1994

• : soft.
• : case.
• : micro.

タイトル別名

94CH34041

MEMS

注記

"IEEE catalog number 94CH3404-1"

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA23023993
• ISBN:
  • 0780318331
  • 078031834X
  • 0780318358
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Piscataway
• ページ数/冊数: xiv, 360 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK153
  • DC20 : 621.3
• 件名:
  • LCSH : Electromechanical devices -- Congresses
  • LCSH : Miniature objects -- Congresses
  • LCSH : Microelectronics -- Congresses
  • LCSH : Robotics -- Congresses