Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

Author(s)

• Rużyłło, Jerzy
• Electrochemical Society. Electronics Division
• Electrochemical Society. Dielectric Science and Technology Division

Bibliographic Information

Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

edited by J. Ruzyllo ... [et al.] ; [sponsored by] the Electrochemical Society. Electronics and Dielectric Science and Technology Divisions

（Proceedings / [Electrochemical Society], v. 94-7）

The Electrochemical Society, c1994

Note

Includes bibliographies and index

"held during the Electrochemical Society Fall Meeting in New Orleans, Louisiana, October 15-20, 1993"

Details

• NCID: BA23030456
• ISBN:
  • 1566770386
• LCCN: 93072867
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, NJ
• Pages/Volumes: xiii, 604 p.
• Size: 23 cm
• Parent Bibliography ID:
  • BA01323290