Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

著者

• Rużyłło, Jerzy
• Electrochemical Society. Electronics Division
• Electrochemical Society. Dielectric Science and Technology Division

書誌事項

Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

edited by J. Ruzyllo ... [et al.] ; [sponsored by] the Electrochemical Society. Electronics and Dielectric Science and Technology Divisions

（Proceedings / [Electrochemical Society], v. 94-7）

The Electrochemical Society, c1994

注記

Includes bibliographies and index

"held during the Electrochemical Society Fall Meeting in New Orleans, Louisiana, October 15-20, 1993"

詳細情報

• NII書誌ID(NCID): BA23030456
• ISBN:
  • 1566770386
• LCCN: 93072867
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: xiii, 604 p.
• 大きさ: 23 cm
• 親書誌ID:
  • BA01323290