Characterization in silicon processing

Author(s)

• Strausser, Yale

Bibliographic Information

Characterization in silicon processing

editor, Yale Strusser ; consulting editors, C.R. Brundle, Gary E. McGuire ; managing editor, Lee E. Fitzpatrick

（Materials characterization series）

Butterworth-Heinemann , Manning, c1993

Note

Includes bibliographical references and index

Details

• NCID: BA23536910
• ISBN:
  • 0750691727
• LCCN: 93022784
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Boston,Greenwich
• Pages/Volumes: xiii, 240 p.
• Size: 25 cm
• Classification:
  • LCC : QC611.8.S5
  • DC20 : 620.1/93
• Subject Headings:
  • LCSH : Silicon
  • LCSH : Electric conductors
  • LCSH : Semiconductor films
  • LCSH : Surface chemistry
• Parent Bibliography ID:
  • BA1935513X