Polymers for microelectronics : resists and dielectrics

著者

• Thompson, L. F.
• Willson, C. G. (C. Grant)
• 田川, 精一 タガワ, セイイチ
• American Chemical Society. Division of Polymeric Materials : Science and Engineering
• American Chemical Society. Meeting

書誌事項

Polymers for microelectronics : resists and dielectrics

Larry F. Thompson, editor, C. Grant Willson, editor, Seiichi Tagawa, editor

（ACS symposium series, 537）

American Chemical Society, 1994

注記

"Developed from a symposium sponsored by the Division of Polymeri Materials: Science and Engineering, Inc., of the American Chemical Society and the Society of Polymer Science, Japan, at the 203rd National Meeting of the American Chemical Society, San Francisco, California, April 5-10, 1992."

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA23564381
• ISBN:
  • 0841227217
• LCCN: 93033955
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Washington, DC
• ページ数/冊数: xii, 571 p.
• 大きさ: 24 cm
• 分類:
  • LCC : TK7871.15.P6
  • DC20 : 621.3815/31
• 件名:
  • LCSH : Microelectronics -- Materials -- Congresses
  • LCSH : Polymers -- Congresses
• 親書誌ID:
  • BA00073096