Integrated processing for micro- and optoelectronics : proceedings of Symposium D on Integrated Processing for Micro- and Optoelectronics of the 1993 E-MRS Spring Conference, Strasbourg, France, May 4-7, 1993

著者

• Symposium D on Integrated Processing for Micro and Optoelectronics
• Nissim, Yves I.
• Katz, Avishay
• Rubloff, G. W. (Gary W.)

書誌事項

Integrated processing for micro- and optoelectronics : proceedings of Symposium D on Integrated Processing for Micro- and Optoelectronics of the 1993 E-MRS Spring Conference, Strasbourg, France, May 4-7, 1993

edited by Y.I. Nissim, A. Katz, G.W. Rubloff

（European Materials Research Society symposia proceedings, v. 42）

North-Holland, c1994

注記

Includes bibliographical references

詳細情報

• NII書誌ID(NCID): BA2376984X
• ISBN:
  • 0444819835
• LCCN: 94022909
• 出版国コード: ne
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Amsterdam ; New York
• ページ数/冊数: xii, 94-398 p.
• 大きさ: 29 cm
• 分類:
  • LCC : TK7836
  • DC20 : 621.3815/2
• 件名:
  • LCSH : Integrated circuits industry -- Congresses
  • LCSH : Optoelectronic devices -- Design and construction -- Congresses
  • LCSH : Manufacturing processes -- Congresses
  • LCSH : Microelectronics -- Congresses
• 親書誌ID:
  • BA07004036