Optical microlithography : technology for the mid-1980s, March 31-April 1, 1982, Santa Clara, California
著者
書誌事項
Optical microlithography : technology for the mid-1980s, March 31-April 1, 1982, Santa Clara, California
（Proceedings / SPIE -- the International Society for Optical Engineering, v. 334）
SPIE--the International Society for Optical Engineering, c1982
- pbk.
大学図書館所蔵 件 / 全5件
-
該当する所蔵館はありません
- すべての絞り込み条件を解除する
注記
"In cooperation with the International Society for Hybrid Microelectronics, the Northern California Microphotomask/Masking Working Group, the Materials Research Society."
Includes bibliographical references and indexes
