Advanced semiconductor processing and characterization of electronic and optical materials : January 24-25, 1984, Los Angeles, California

著者

• Sadana, Devendra K.
• Lampert, Carl M.
• American Vacuum Society. Electronic Materials and Process Division
• Society of Photo-optical Instrumentation Engineers

書誌事項

Advanced semiconductor processing and characterization of electronic and optical materials : January 24-25, 1984, Los Angeles, California

chairmen/editors: Devendra K. Sadana, Carl M. Lampert ; cooperating organizations: American Vacuum Society, Electronic Materials and Process Division

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 463）

S.P.I.E.-- International Society for Optical Engineering, c1984

• pbk.

注記

Includes bibliographies and index

• NII書誌ID(NCID): BA23969135
• ISBN:
  • 0892524987
• LCCN: 84050522
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: vi, 147 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7871.85
  • DC19 : 621.3815/2
• 件名:
  • LCSH : Semiconductors -- Congresses
• 親書誌ID:
  • BA0022700X