Advanced semiconductor processing and characterization of electronic and optical materials : January 24-25, 1984, Los Angeles, California

Author(s)

• Sadana, Devendra K.
• Lampert, Carl M.
• American Vacuum Society. Electronic Materials and Process Division
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Advanced semiconductor processing and characterization of electronic and optical materials : January 24-25, 1984, Los Angeles, California

chairmen/editors: Devendra K. Sadana, Carl M. Lampert ; cooperating organizations: American Vacuum Society, Electronic Materials and Process Division

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 463）

S.P.I.E.-- International Society for Optical Engineering, c1984

• pbk.

Note

Includes bibliographies and index

Details

• NCID: BA23969135
• ISBN:
  • 0892524987
• LCCN: 84050522
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash., USA
• Pages/Volumes: vi, 147 p.
• Size: 28 cm
• Classification:
  • LCC : TK7871.85
  • DC19 : 621.3815/2
• Subject Headings:
  • LCSH : Semiconductors -- Congresses
• Parent Bibliography ID:
  • BA0022700X