Multilayer and grazing incidence X-ray/EUV optics for astronomy and projection lithography : 19-22 July 1992, San Diego, California

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Multilayer and grazing incidence X-ray/EUV optics for astronomy and projection lithography : 19-22 July 1992, San Diego, California

Richard B. Hoover, Arthur B.C. Walker, chairs/editors

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1742）

SPIE, c1993

  • : pbk

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Includes bibliographical references and index

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  • Proceedings

    SPIE -- the International Society for Optical Engineering

    SPIE -- the International Society for Optical Engineering

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