Micron and submicron integrated circuit metrology : August 22-23, 1985, San Diego, California

著者

• Monahan, Kevin M.
• University of Arizona. Optical Sciences Center
• University of Rochester. Institute of Optics
• Society of Photo-optical Instrumentation Engineers

書誌事項

Micron and submicron integrated circuit metrology : August 22-23, 1985, San Diego, California

Kevin M. Monahan, chairman/editor ; cooperating organizations, Optical Sciences Center/University of Arizona, Institute of Optics/University of Rochester

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 565）

SPIE--International Society for Optical Engineering, 1985

• pbk.

注記

Includes bibliographies

詳細情報

• NII書誌ID(NCID): BA24008190
• ISBN:
  • 0892526009
• LCCN: 85062883
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: vi, 223 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7874
  • DC19 : 621.381/73
• 件名:
  • LCSH : Integrated circuits -- Measurement -- Congresses
  • LCSH : Integrated circuits -- Testing -- Congresses
• 親書誌ID:
  • BA0022700X