Advances in resist technology and processing III : 10-11 March 1986, Santa Clara, California
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Advances in resist technology and processing III : 10-11 March 1986, Santa Clara, California
（Proceedings / SPIE -- the International Society for Optical Engineering, v. 631）
SPIE--the International Society for Optical Engineering, c1986
- pbk.
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Includes bibliographies and index
