Advances in resist technology and processing III : 10-11 March 1986, Santa Clara, California

著者

• Willson, C. G. (C. Grant)
• Society of Photo-optical Instrumentation Engineers

書誌事項

Advances in resist technology and processing III : 10-11 March 1986, Santa Clara, California

C. Grant Willson, chairman/editor

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 631）

SPIE--the International Society for Optical Engineering, c1986

• pbk.

注記

Includes bibliographies and index

詳細情報

• NII書誌ID(NCID): BA24022715
• ISBN:
  • 0892526661
• LCCN: 86061032
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: vi, 346 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TR940
  • DC19 : 686.2/325
• 件名:
  • LCSH : Photoresists -- Congresses
• 親書誌ID:
  • BA0022700X