Growth mechanisms and dynamics

著者

• Hurle, D. T. J.

書誌事項

Growth mechanisms and dynamics

edited by D.T.J. Hurle

（Handbook of crystal growth, v. 3 . Thin films and epitaxy ; pt. B）

North-Holland, 1994

注記

Includes bibliographical references and index

内容説明・目次

内容説明

Part A reviews the basic techniques of halide, organometallic and molecular beam epitaxy, liquid and solid phase epitaxial techniques, rapid solidification by pulsed laser annealing and laser ablation of oxide thin films. The final chapter is devoted to the growth of diamond films.Part B covers the underlying mechanisms and dynamics of epitaxial growth processes including nucleation, structural, kinetic and transport effects. In addition, refinements of some of the growth techniques described in Part A such as atomic layer, migration-enhanced and photo-assisted epitaxial processes are also described.

目次

Part A. Basic Techniques 1. Halogen transport epitaxy (H. Watanabe). 2. Levitation epitaxy (H.M. Cox). 3. The principles and practice of organometallic vapor phase epitaxy (D.W. Kisker, T.F. Kuech). 4. Principles of molecular beam epitaxy (C.T. Foxon). 5. Molecular beam epitaxy with gaseous source (H. Hirayama, H. Asahi). 6. Liquid phase epitaxy (M.B. Small, E.A. Giess, R. Ghez). 7. Solid phase epitaxy (G.L. Olson, J.A. Roth). 8. Rapid solidification of silicon and some silicides by pulsed laser annealing (P. Baeri, S.U. Campisano). 9. Pulsed laser ablation-deposition of multicomponent oxide thin films: basic laser ablation and deposition processes and influence on film characteristics (O. Auciello). 10. Growth of diamond films from the vapour phase (B.V. Spitsyn).Part B. Growth Mechanisms and Dynamics 11. Kinetic processes in vapour growth (A.A. Chernov). 12. Organometallic vapor phase epitaxy reaction kinetics (G.B. Stringfellow). 13. Transport phenomena in vapor phase epitaxy reactors (K.F. Jensen). 14. Atomic layer epitaxy (T. Suntola). 15. Nucleation and surface diffusion in molecular beam epitaxy (T. Nishinaga). 16. Migration-enhanced epitaxy (Y. Horikoshi). 17. Metalorganic vapour phase epitaxial growth of ultra-thin quantum wells and heterostructures (L. Samuelson, W. Seifert). 18. Photoassisted epitaxy (S.J.C. Irvine). 19. In situ optical studies of epitaxial growth (C. Pickering). 20. Atomic mechanisms in semiconductor liquid phase epitaxy (E. Bauser). 21. Artificial epitaxy (graphoepitaxy) (E.I. Givargizov). 22. Structural effects in coherent epitaxial semiconductor films (A. Zunger).

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詳細情報

• NII書誌ID(NCID): BA24065988
• ISBN:
  • 0444815562
• 出版国コード: ne
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Amsterdam ; Tokyo
• ページ数/冊数: vi, [459]-1065 p.
• 大きさ: 25 cm
• 件名:
  • LCSH : Crystals -- Growth
• 親書誌ID:
  • BA20635665