Secondary ion mass spectrometry : SIMS IX : Proceedings of the Ninth International Conference on Secondary Ion Mass Spectrometry (SIMS IX) : the Hotel Yokohama and the Sangyo-Boeki Center Building Yokohama, Japan 7-12 November, 1993

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Secondary ion mass spectrometry : SIMS IX : Proceedings of the Ninth International Conference on Secondary Ion Mass Spectrometry (SIMS IX) : the Hotel Yokohama and the Sangyo-Boeki Center Building Yokohama, Japan 7-12 November, 1993

editors, A. Benninghoven ... [et al.]

Wiley, c1994

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内容説明・目次

内容説明

This volume contains the proceedings of the 9th International Conference on Secondary Ion Mass Spectrometry (SIMS IX), held in Yokohama, Japan, in November 1993. The contributors explore a range of research issues, from environmental problems to depth profiling and semiconductors.

目次

  • Fundamentals
  • Quantification
  • Instrumentation
  • Post Ionization
  • CsX+-SIMS
  • ToF-SIMS
  • Surface Analysis
  • Combined Techniques
  • Imaging and Focused Ion Beam
  • Applications
  • Depth Profiling and Semiconductors
  • Organic and Biological Materials
  • Insulators and Metals
  • Geological Materials
  • Environmental Problems
  • Workshops.

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