Integrated circuit metrology, inspection, and process control III : 27-28 February 1989, Los Angeles, California

Author(s)

• Monahan, Kevin M.
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

Integrated circuit metrology, inspection, and process control III : 27-28 February 1989, Los Angeles, California

Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1087）

UMI, c1989

Note

Facsimile reprint. originally published: Bellingham, Wash. : SPIE

Includes bibliographical references and index

Details

• NCID: BA2506993X
• ISBN:
  • 0819401226
• LCCN: 89060657
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Ann Arbor, MI
• Pages/Volumes: x, 535 p.
• Size: 28 cm
• Classification:
  • LCC : TK7874
  • DC20 : 621.381/5
• Subject Headings:
  • LCSH : Integrated circuits -- Inspection -- Congresses
  • LCSH : Integrated circuits -- Measurement -- Congresses
• Parent Bibliography ID:
  • BA0022700X