Integrated circuit metrology, inspection, and process control III : 27-28 February 1989, Los Angeles, California

著者

• Monahan, Kevin M.
• Society of Photo-optical Instrumentation Engineers

書誌事項

Integrated circuit metrology, inspection, and process control III : 27-28 February 1989, Los Angeles, California

Kevin M. Monahan, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1087）

UMI, c1989

注記

Facsimile reprint. originally published: Bellingham, Wash. : SPIE

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA2506993X
• ISBN:
  • 0819401226
• LCCN: 89060657
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Ann Arbor, MI
• ページ数/冊数: x, 535 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7874
  • DC20 : 621.381/5
• 件名:
  • LCSH : Integrated circuits -- Inspection -- Congresses
  • LCSH : Integrated circuits -- Measurement -- Congresses
• 親書誌ID:
  • BA0022700X