Proceedings, IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems : Amsterdam, Netherlands, January 29, February 2, 1995

著者

• IEEE Robotics and Automation Society
• American Society of Mechanical Engineers. Dynamic Systems and Control Division
• Micromachine Center
• IEEE Workshop on Micro Electro Mechanical Systems

書誌事項

Proceedings, IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems : Amsterdam, Netherlands, January 29, February 2, 1995

sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division

IEEE Service Center, c1995

• : soft.
• : case.
• : micro.

タイトル別名

95CH35754

95CB35754

MEMS

MEMS95

注記

"IEEE catalog number 95CH35754"

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA25703649
• ISBN:
  • 0780325036
  • 0780325044
  • 0780325052
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Piscataway
• ページ数/冊数: 418 p.
• 大きさ: 30 cm
• 分類:
  • LCC : TK153
  • DC20 : 621.3
• 件名:
  • LCSH : Electromechanical devices -- Congresses
  • LCSH : Miniature objects -- Congresses
  • LCSH : Microelectronics -- Congresses
  • LCSH : Robotics -- Congresses