Advanced techniques for integrated circuit processing : 1-5 October 1990, Santa Clara, California

著者

• Bondur, James
• Turner, Terry R.
• Society of Photo-optical Instrumentation Engineers

書誌事項

Advanced techniques for integrated circuit processing : 1-5 October 1990, Santa Clara, California

James Bondur, Terry R. Turner, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1392）

SPIE, c1991

注記

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA25824701
• ISBN:
  • 0819404616
• LCCN: 90050808
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash., USA
• ページ数/冊数: x, 690 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7874
  • DC20 : 621.381/5
• 件名:
  • LCSH : Integrated circuits -- Design and construction -- Congresses
• 親書誌ID:
  • BA0022700X