Integrated circuit quality and reliability

著者

    • Hnatek, Eugene R.

書誌事項

Integrated circuit quality and reliability

Eugene R. Hnatek

(Electrical engineering and electronics, 91)

M. Dekker, c1995

2nd ed., rev. and expanded

  • :acid-free paper

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注記

Includes bibliographical references and index

内容説明・目次

内容説明

Examines all important aspects of integrated circuit design, fabrication, assembly and test processes as they relate to quality and reliability. This second edition discusses in detail: the latest circuit design technology trends; the sources of error in wafer fabrication and assembly; avenues of contamination; new IC packaging methods; new in-line process monitors and test structures; and more.;This work should be useful to electrical and electronics, quality and reliability, and industrial engineers; computer scientists; integrated circuit manufacturers; and upper-level undergraduate, graduate and continuing-education students in these disciplines.

目次

  • Overview. Part 1 Introduction to integrated circuit manufacturing processes: front-end IC fabrication operations
  • back-end fabrication operations
  • in-line process monitors and test structures. Part 2 Impact of new technologies: circuit design trends
  • changing fabrication techniques
  • packaging technology trends
  • electrical testing of VLSICs and ASICs. Part 3 Contamination and manufacturing errors: contamination
  • human contamination (people)
  • IC processing contamination
  • contamination control
  • computer-based sources of error in design and test circuit design
  • material issues. Part 4 Causes (sources) of IC failures: fabrication-related causes of defects
  • packaging and assembly related causes of IC failures
  • reliability improvement. Part 5 Introduction to screening: screening.

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