Dry etch technology : 9-10-September 1991, San Jose, California
著者
書誌事項
Dry etch technology : 9-10-September 1991, San Jose, California
(Proceedings / SPIE -- the International Society for Optical Engineering, v. 1593)
SPIE, c1992
大学図書館所蔵 件 / 全2件
-
該当する所蔵館はありません
- すべての絞り込み条件を解除する
注記
"Part of a two-conference program on Microelectronic Manufacturing Science and Technology held at SPIE's 1991 Symposium on Microelectronic Processing Integration, 9-13 September 1991, in San Jose, California"--P. v
Includes bibliographical references and index