Rapid thermal and integrated processing : 10-11 September 1991, San Jose, California

著者

• Moslehi, Mehrdad M.
• Singh, Rajendra
• Kwong, Dim-Lee
• Society of Photo-optical Instrumentation Engineers

書誌事項

Rapid thermal and integrated processing : 10-11 September 1991, San Jose, California

Mehrdad M. Moslehi, Rajendra Singh, Dim-Lee Kwong, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1595）

SPIE, c1992

注記

"Part of a two-conference program on Rapid Thermal Processing and Metallization held at SPIE's 1991 Symposium on Microelectronic Processing Integration, 9-13 September 1991, in San Jose, California"--P. ix

Includes bibliographical references and index

詳細情報

• NII書誌ID(NCID): BA2630732X
• ISBN:
  • 0819407267
• LCCN: 91067548
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Bellingham, Wash.
• ページ数/冊数: ix, 207 p.
• 大きさ: 28 cm
• 分類:
  • LCC : TK7871.85
  • DC20 : 621.3815/2
• 件名:
  • LCSH : Semiconductors -- Heat treatment -- Congresses
  • LCSH : Semiconductor doping -- Congresses
  • LCSH : Vapor-plating -- Congresses
  • LCSH : Rapid thermal processing -- Congresses
• 親書誌ID:
  • BA0022700X