12th Annual Symposium on Photomask Technology and Management : 23-24 September 1992, Sunnyvale, California

Author(s)

• Symposium on Photomask Technology and Management
• BACUS (Technical group)
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

12th Annual Symposium on Photomask Technology and Management : 23-24 September 1992, Sunnyvale, California

sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 1809）

SPIE, c1993

Other Title

Twelfth Annual Symposium on Photomask Technology and Management

Note

Includes bibliographical references and index

Details

• NCID: BA26617870
• ISBN:
  • 0819410098
• LCCN: 92062651
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: ix, 286 p.
• Size: 28 cm
• Classification:
  • LCC : TK7874
  • DC20 : 621.3815/31
• Subject Headings:
  • LCSH : Integrated circuits -- Masks -- Congresses
  • LCSH : Microlithography -- Congresses
• Parent Bibliography ID:
  • BA0022700X