Uwe F.W. Behringer, chair/editor ; Wilhelm Maurer, Jacques Waelpoel, program chairs ; organized by VDE/VDI GMM--the Society for Microelectronics, Micro- and Precision Engineering (Germany) ; cooperating organizations, BACUS ... [et al.]

SPIE c2008 Proceedings / SPIE -- the International Society for Optical Engineering v. 6792

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Hidehiro Watanabe, editor ; sponsored by PMJ--Photomask Japan, BACUS--the international technical group of SPIE dedicated to the advancement of photomask technology, SPIE--the International Society for Optical Engineering

SPIE c2007 Proceedings / SPIE -- the International Society for Optical Engineering v. 6607

: pt. 1

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Hiroyoshi Tanabe, editor ; sponsored by PMJ--Photomask Japan, BACUS--the international technical group of SPIE dedicated to the advancement of photomask technology, [and] SPIE--the International Society for Optical Engineering ; cooperating organizations for symposium, the Japan Society of Applied Physics ... [et al.] ; cooperating organization for technical exhibit, SEMI Japan ; supported by Yokohama City ; published by SPIE--the International Society for Optical Engineering

SPIE c2003 Proceedings / SPIE -- the International Society for Optical Engineering v. 5130

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Hiroichi Kawahira, editor ; sponsored by PMJ--Photomask Japan, BACUS, [and] SPIE--the International Society for Optical Engineering ; cooperating organizations for symposium, the Japan Society of Applied Physics ... [et al.] ; supported by Yokohama City

SPIE c2001 Proceedings / SPIE -- the International Society for Optical Engineering v. 4409

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Hiroaki [i.e. Hiraoki] Morimoto, editor ; sponsored by Photomask Japan, BACUS, [and] SPIE--the International Society for Optical Engineering ; cooperating organizations for symposium, Japan Society of Applied Physics, Japan Society for Precision Engineering, [and] Institute of Electrical Engineers of Japan ; cooperating organization for technical exhibit, SEMI Japan

SPIE c2000 Proceedings / SPIE -- the International Society for Optical Engineering v. 4066

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Brian J. Grenon, Frank E. Abboud, chairs/editors ; sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology ; published by SPIE--the International Society for Optical Engineering

SPIE c1998 Proceedings / SPIE -- the International Society for Optical Engineering v. 3546

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James A Reynolds, Brian J. Grenon, chairs/editors ; sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology

SPIE c1998 Proceedings / SPIE -- the International Society for Optical Engineering v. 3236

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Hideo Yoshihara, editor ; sponsored by Photomask Japan, BACUS, SPIE--the International Society for Optical Engineering

SPIE c1996 Proceedings / SPIE -- the International Society for Optical Engineering v. 2793

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Gregory K. Hearn, editor ; sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology

SPIE Optical Engineering Press c1994 Critical reviews of optical science and technology CR51

hardcover

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Hideo Yoshihara, chair/editor ; sponsored by Japan Chapter of SPIE ; cosponsored by BACUS, SPIE--the International Society for Optical Engineering

SPIE c1994 Proceedings / SPIE -- the International Society for Optical Engineering v. 2254

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