ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands

著者

• Satellite Symposium to ESSDERC '95
• Kolbesen, Bernd O.
• Claeys, Cor L.
• Stallhofer, Peter
• Electrochemical Society. Electronics Division
• European Solid State Device Research Conference

書誌事項

ALTECH 95 : analytical techniques for semiconductor materials and process characterization II : proceedings of the Satellite Symposium to ESSDERC 95, The Hague, The Netherlands

edited by Bernd O. Kolbesen, Cor Claeys, Peter Stallhofer ; [sponsored by] Electronics Division

（Proceedings / [Electrochemical Society], v. 95-30）

Electrochemical Society, c1995

タイトル別名

Analytical techniques for semiconductor materials and process characterization II

注記

ALTECH 95 was held Sept. 28-29, 1995 in The Hague, Netherlands in conjunction with ESSDERC 95, the 25th European Solid State Device Research Conference, held Sept. 24-27, 1995

Includes bibliographical references and indexes

詳細情報

• NII書誌ID(NCID): BA27796684
• ISBN:
  • 1566771226
• LCCN: 96061603
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: ix, 366 p.
• 大きさ: 23 cm
• 分類:
  • LCC : QD139.S44
• 件名:
  • LCSH : Semiconductors -- Analysis -- Congresses
• 親書誌ID:
  • BA01323290