Semiconductor characterization : present status and future needs
著者
書誌事項
Semiconductor characterization : present status and future needs
American Institute of Physics, 1996
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注記
Includes index
内容説明・目次
内容説明
This book serves as a baseline reference for the characterization of semiconductors for the next decade. It includes sections devoted to characterization for silicon IC development and manufacturing and for III-V compound semiconductor materials, devices, and manufacturing. This book acts as a reference or sourcebook for industry, government and academia who are interested in the reviews and state-of-the-art knowledge presented on semiconductor issues pertaining to the subject of semiconductor characterization for semiconductor research, development, and manufacturing.
目次
Contents: 1. Drivers for Silicon Process Development and Manufacturing. 2. Metrology Requirements for Beyond 0.35-um Geometries 3. Silicon Wafers, Gate Dielectrics, and Process Simulation. 4. Interconnects and Failure Analysis. 5. Critical Analytical Methods. 6. In-Situ, Real Time Diagnosis, Analysis, and Control. 7. Frontiers in Compound Semiconductors.
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