Semiconductor characterization : present status and future needs

著者

書誌事項

Semiconductor characterization : present status and future needs

editors, W.M. Bullis, D.G. Seiler, A.C. Diebold

American Institute of Physics, 1996

大学図書館所蔵 件 / 全16件

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注記

Includes index

内容説明・目次

内容説明

This book serves as a baseline reference for the characterization of semiconductors for the next decade. It includes sections devoted to characterization for silicon IC development and manufacturing and for III-V compound semiconductor materials, devices, and manufacturing. This book acts as a reference or sourcebook for industry, government and academia who are interested in the reviews and state-of-the-art knowledge presented on semiconductor issues pertaining to the subject of semiconductor characterization for semiconductor research, development, and manufacturing.

目次

Contents: 1. Drivers for Silicon Process Development and Manufacturing. 2. Metrology Requirements for Beyond 0.35-um Geometries 3. Silicon Wafers, Gate Dielectrics, and Process Simulation. 4. Interconnects and Failure Analysis. 5. Critical Analytical Methods. 6. In-Situ, Real Time Diagnosis, Analysis, and Control. 7. Frontiers in Compound Semiconductors.

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