Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing

Author(s)

• Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing
• Meyyappan, M.
• Economou, D. J.
• Butler, S. W. (Stephanie Watts)

Bibliographic Information

Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing

editors, M. Meyyappan, D. J. Economou, S. W. Butler

（Proceedings / [Electrochemical Society], v. 95-2）

Electrochemical Society, c1995

Details

• NCID: BA2815058X
• ISBN:
  • 1566770963
• LCCN: 95060437
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Pennington, NJ
• Pages/Volumes: x, 630 p.
• Size: 24 cm
• Parent Bibliography ID:
  • BA01323290