Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing

著者

• Symposium on Process Control, Diagnostics, and Modeling in Semiconductor Manufacturing
• Meyyappan, M.
• Economou, D. J.
• Butler, S. W. (Stephanie Watts)

書誌事項

Proceedings of the Symposium on Process control, Diagnostics, and Modeling in Semiconductor Manufacturing

editors, M. Meyyappan, D. J. Economou, S. W. Butler

（Proceedings / [Electrochemical Society], v. 95-2）

Electrochemical Society, c1995

詳細情報

• NII書誌ID(NCID): BA2815058X
• ISBN:
  • 1566770963
• LCCN: 95060437
• 出版国コード: us
• タイトル言語コード: eng
• 本文言語コード: eng
• 出版地: Pennington, NJ
• ページ数/冊数: x, 630 p.
• 大きさ: 24 cm
• 親書誌ID:
  • BA01323290