Proceedings, the Ninth Annual International Workshop on IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems : San Diego, California, USA, February 11-15, 1996
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書誌事項
Proceedings, the Ninth Annual International Workshop on IEEE Micro Electro Mechanical Systems : an investigation of micro structures, sensors, actuators, machines and systems : San Diego, California, USA, February 11-15, 1996
IEEE Service Center, c1996
- : soft
- : case
- : micro
- タイトル別名
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96CB35856
96CH35856
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"IEEE catalog number: 96CH35856"
Includes bibliographical references and indexes