Nanotechnology : integrated processing systems for ultra-precision and ultra-fine products

Bibliographic Information

Nanotechnology : integrated processing systems for ultra-precision and ultra-fine products

edited by Norio Taniguchi

(Oxford science publications)

Oxford University Press, 1996

Available at  / 26 libraries

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Note

"This publication was supported by a generous donation from the Daido Life Foundation"

Includes bibliographical references and index

Description and Table of Contents

Description

The manufacture of integrated circuits and opto- electronic devices, for example, calls for accuracies in the nanometre range (approximately three atomic lattice spacings). This book examines the technology and systems needed to achieve this level of accuracy. It is written by the leading researchers in Japan, that is the world leaders. The underlying concept of nanotechnology systems comes from the prediction that the extremely high accuracy required in materials processing will ultimately reach the order of 1nm (nanometer) = 0.001 m. Since the distance between lattice atoms is about 0.3 nm this constitutes the limit in resolution for measurable or confirmable lengths of solid materials. This leads directly to processing at the atomic bit level at which sub-nm resolution becomes necessary. This means that the accuracy and resolution of the positioning and measuring apparatus used in atomic bit processing must at least be on the order of sub-nm. Nanotechnology is thus concerned with integrated processing systems with measurement, position control, and processing technologies in the sub-nm range. This is essential in the fabrication of extremely precise and fine parts. fabrication of extremely precise and fine parts.

Table of Contents

  • PART 1: FUNDAMENTALS OF NANOTECHNOLOGY
  • PART 2: APPLICATIONS OF NANOTECHNOLOGY
  • PART 3: FUTURE TRENDS IN NANOTECHNOLOGY

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Details

  • NCID
    BA28586009
  • ISBN
    • 0198562837
  • LCCN
    95035238
  • Country Code
    uk
  • Title Language Code
    eng
  • Text Language Code
    eng
  • Place of Publication
    Oxford ; Tokyo
  • Pages/Volumes
    xiv, 406 p.
  • Size
    26 cm
  • Classification
  • Subject Headings
  • Parent Bibliography ID
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