64- to 256-megabit reticle generation : technology requirements and approaches
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書誌事項
64- to 256-megabit reticle generation : technology requirements and approaches
（Critical reviews of optical science and technology, v. CR51）
SPIE Optical Engineering Press, c1994
- pbk.
- タイトル別名
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Sixty-four to two hundred fifty-six-megabit reticle generation
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注記
"Proceedings of a conference held 24 September 1993, Santa Clara, California, sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology."
Includes bibliographical references and index
