64- to 256-megabit reticle generation : technology requirements and approaches

Author(s)

• Hearn, Gregory K.
• BACUS (Technical group)
• Society of Photo-optical Instrumentation Engineers

Bibliographic Information

64- to 256-megabit reticle generation : technology requirements and approaches

Gregory K. Hearn, editor

（Critical reviews of optical science and technology, v. CR51）

SPIE Optical Engineering Press, c1994

• pbk.

Other Title

Sixty-four to two hundred fifty-six-megabit reticle generation

Note

"Proceedings of a conference held 24 September 1993, Santa Clara, California, sponsored by BACUS--the International Technical Group of SPIE dedicated to the advancement of photomask technology."

Includes bibliographical references and index

Details

• NCID: BA28802013
• ISBN:
  • 0819413577
• LCCN: 93046150
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: vii, 273 p.
• Size: 27 cm
• Classification:
  • LCC : TK7874
  • DC20 : 621.3815/31
• Subject Headings:
  • LCSH : Integrated circuits -- Masks -- Congresses
  • LCSH : Reticles -- Congresses
  • LCSH : Microlithography -- Congresses
  • LCSH : Semiconductor storage devices -- Design and construction -- Congresses
• Parent Bibliography ID:
  • BA07938028