Processing of semiconductors

Author(s)

• Cahn, R. W. (Robert W.)
• Haasen, P. (Peter)
• Kramer, E. J. (Edward J.)
• Jackson, Kenneth A.

Bibliographic Information

Processing of semiconductors

volume editor, Kenneth A. Jackson

（Materials science and technology : a comprehensive treatment / edited by R.W. Cahn, P. Haasen, E.J. Kramer, vol. 16）

VCH, c1996

• : gw

Note

Includes bibliographical references and index

Details

• NCID: BA29133735
• ISBN:
  • 3527268294
• Country Code: gw
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Weinheim, FDR ; New York
• Pages/Volumes: 689 p.
• Size: 25 cm
• Subject Headings:
  • LCSH : Materials
• Parent Bibliography ID:
  • BA11923352