Processing of semiconductors
著者
書誌事項
Processing of semiconductors
（Materials science and technology : a comprehensive treatment / edited by R.W. Cahn, P. Haasen, E.J. Kramer, vol. 16）
VCH, c1996
- : gw
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注記
Includes bibliographical references and index
内容説明・目次
内容説明
This volume is part of a series devoted to the growing interdisciplinary field of materials science and technology. A compendium of current state-of-the-art information, the series covers the most important classes of materials: metals; ceramics; glasses; polymers; semiconductors; and composites. Each volume deals with properties, processing, applications or general phenomena associated with these materials. This volume deals with the processing of semiconductors.
目次
- Silicon Processing (J. Wilkes)
- Compound Semiconductor Processing (J. Mullin)
- Epitaxial Growth (T. Kuech & M. Tischler)
- Photolithography (R. Leuschner & G. Pawlowski)
- Selective Doping (S. Mahajan)
- Etching Processes in Semiconductor Manufacturing (K. Donohoe, et al.)
- Silicon Device Structures (C.-Y. Chang & S. Sze)
- Compound Semiconductor Device Structures (W. Stanchina & J. Lam)
- Silicon Device Processing (D.-L. Kwong)
- Compound Semiconductor Device Processing (J. Parsey)
- Integrated Circuit Packaging (D. Amey)
- Interconnection Systems (W. Knausenberger)
- Index.
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