Photomask and X-ray mask technology : 22 April 1994, Kawasaki City, Kanagawa, Japan

Author(s)

• Yoshihara, Hideo
• Society of Photo-optical Instrumentation Engineers. Japan Chapter
• BACUS (Technical group)
• Photomask Japan '94

Bibliographic Information

Photomask and X-ray mask technology : 22 April 1994, Kawasaki City, Kanagawa, Japan

Hideo Yoshihara, chair/editor ; sponsored by Japan Chapter of SPIE ; cosponsored by BACUS, SPIE--the International Society for Optical Engineering

（Proceedings / SPIE -- the International Society for Optical Engineering, v. 2254）

SPIE, c1994

Note

"Papers presented at Photomask Japan '94 held at the Kanagawa Science Park in Kawasaki, Japan, on 22 April 1994"--P. ix

Includes bibliographical references and index

Details

• NCID: BA29150665
• ISBN:
  • 0819415634
• LCCN: 94065772
• Country Code: us
• Title Language Code: eng
• Text Language Code: eng
• Place of Publication: Bellingham, Wash.
• Pages/Volumes: ix, 488 p.
• Size: 28 cm
• Classification:
  • LCC : TK7874
  • DC20 : 621.3815/31
• Subject Headings:
  • LCSH : Integrated circuits -- Masks -- Congresses
  • LCSH : Microlithography -- Congresses
• Parent Bibliography ID:
  • BA0022700X